ID Marking Systems

This is an example of a simple, manually loaded wafer id marker.

Features:

• 30watt CO₂ laser
• 16-bit high precision galvanometer system
• super high resolution lens with 2" x 2" marking field
• three-pin wafer alignment guides with electronic position confirmation
• fume extraction system
• CDRH Class I enclosure

This system is fully automated.

Features:

• 1.5watt frequency tripled Nd:YVO₄ laser supported by X/Y/Z axes motion
• 16-bit high precision galvanometer system
• high resolution 0.75" marking field
• cassette-to-cassette workstation with four load/unload stations
• Genmark BG-4 robot wafer transport
• wafer pre-aligner
• two-position rotary table
• OCR verification
• CDRH Class I enclosure