This is an example of a simple, manually loaded wafer id marker. Features: 30watt CO2 laser 16-bit high precision galvanometer system super high resolution lens with 2" x 2" marking field three-pin wafer alignment guides with electronic position confirmation fume extraction system CDRH Class I enclosure
Features:
This system is fully automated. Features: 1.5watt frequency tripled Nd:YVO4 laser supported by X/Y/Z axes motion 16-bit high precision galvanometer system high resolution 0.75" marking field cassette-to-cassette workstation with four load/unload stations Genmark BG-4 robot wafer transport wafer pre-aligner two-position rotary table OCR verification CDRH Class I enclosure